JPS63131131U - - Google Patents
Info
- Publication number
- JPS63131131U JPS63131131U JP2233187U JP2233187U JPS63131131U JP S63131131 U JPS63131131 U JP S63131131U JP 2233187 U JP2233187 U JP 2233187U JP 2233187 U JP2233187 U JP 2233187U JP S63131131 U JPS63131131 U JP S63131131U
- Authority
- JP
- Japan
- Prior art keywords
- layer
- test electrode
- inclined surface
- semiconductor device
- conductive wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000000523 sample Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 3
- 239000012212 insulator Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2233187U JPS63131131U (en]) | 1987-02-18 | 1987-02-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2233187U JPS63131131U (en]) | 1987-02-18 | 1987-02-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63131131U true JPS63131131U (en]) | 1988-08-26 |
Family
ID=30819617
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2233187U Pending JPS63131131U (en]) | 1987-02-18 | 1987-02-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63131131U (en]) |
-
1987
- 1987-02-18 JP JP2233187U patent/JPS63131131U/ja active Pending